壓電奈米定位器

3-axis Nano-positioner (Model: NP-T-10)

unit

tolerance

Active axis (axes)

X/Y/Z 

Open-loop travel (X/Y/Z)

10/10/10

mm

+20% / -0%

Open-loop resolution

0.2

nm

typ.

Closed-loop travel

-

mm

calibrated

Closed-loop resolution

-

nm

typ.