RTP-RTN System

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產品內容

Description: AST Cheetah RTP / RTA System provides the complete product line covering the production scale from volume production, pilot production to RD platform. Cheetah RTP / RTA System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, and Touch Panel. 1) Implant Annealing / Activation 2) Alloy 3) PSG/BPSG Reflow 4) Eutectic Reflow 5) Trench Oxidation 6) Gate Dielectric Formation 7) Poly –Si Annealing 8) Ti Silicide / Nitride Features: Cheetah series has system configuration for manual, semi, and fully auto system, suitable for different customer application. Specification: Standard Model for Manual, Semi-Auto, Fully-Auto, Single and Dual Chamber with Dual Robot Arm Available. Please contact AST for your application. Safety Approval: TUV Country of Original: Taiwan Main Export Markets: Worldwide半套店
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公司資訊

  1. 統一編號80071060
  2. 聯絡人翁慶毅
  3. 更多AST聚昌科技有限公司資訊
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