Sputter System

Description: AST Aurora Sputter System provides the complete product line covering the production scale from volume production, pilot production to RD platform for Metal and Dielectric film deposition. Aurora Sputter System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device, TCO, and AR Coatings. 1) Metal Film Deposition 2) Alloy Co-Deposition 3) Dielectric Film Deposition 4) Optical Film Coating 5) Anti-Reflection (AR) Coating 6) TCO Coating 7) Mirror Coating 8) Ohmic Metal Deposition Features: Aurora series has system configuration for Upward, Downward, and Vertical sputtering requirement, suitable for different customer application. Specification: DC, RF, Pulse DC Power. Please contact AST for your application. Safety Approval: TUV Country of Origin: Taiwan Main Export Markets:Worldwide拖車運輸