【工控王國】半導體設備零組件銷售與維修

(LAM RESEARCH) VME Board 605-048878-001
(LAM RESEARCH) OnBoard Power Distribution Board 810-058546-003
(LAM RESEARCH) LTC Node65 Temp Controller Board 853-049542-150
(LAM RESEARCH) V3 FDS W/ Reclaim Breakout Board 810-069165-002
(LAM RESEARCH) Node Type 24 Board  810-056663-005
(LAM RESEARCH) ATM Node 3 Board  810-013872-003
(LAM RESEARCH) ATM Motherboard 810-025691-101
(LAM RESEARCH) V3 Onboard w/ Reclaim Motherboard 810-069166-002
(LAM RESEARCH) Brooks Automation Loadport Signal Board 002-6878-06
(LAM RESEARCH) Ocean Optics Spectrometer 685-801852-004
(LAM RESEARCH) ESC Liner 714-801511-002
(LAM RESEARCH) Liner Upper 300mm-Z Axis 715-801021-838
(LAM RESEARCH) Plt Gas Dist 300mm 715-801916-008
(LAM RESEARCH) Quartz Nozzle Injector 716-012639-024
(LAM RESEARCH) Valve VAT Pendulum 2300 Poly 796-901160-001
(LAM RESEARCH) Node Board 810-800256-005
(LAM RESEARCH) Board Card 810-802799-115
(LAM RESEARCH) Motherboard 810-810193-103
(LAM RESEARCH) Bellows Assy 839-430126-005
(LAM RESEARCH) PCB, Dual Esc Pwr Supply, V-Sense Intfc (Parts)  810-800961-009
(LAM RESEARCH) Electrostatic Chuck 839-800327-312

(LAM RESEARCH) RF Coaxial Cable
834-030819-018
834-030822-025

(LAM RESEARCH) Window Quartz
716-012640-011
716-012640-012
796-901039-001

(LAM RESEARCH) Automatch RF box 853-800120-012
(LAM RESEARCH) Bias Match 853-800089-103
(LAM RESEARCH) Ring Edge Top Wide 300mm 716-331142-304 
(LAM RESEARCH) Ceramic Ring Esc Hsg Bias Electrode 716-800330-004
(LAM RESEARCH) Insulator, bottom, ESC 716-800330-062
(LAM RESEARCH) Watlow Anafaze PCB 778-900046-301
(LAM RESEARCH) Valve With Flow Switch 796-003146-001
(LAM RESEARCH) Wldmnt, ESC FAC Pl, Flex 839-800332-014
(LAM RESEARCH)  Voltage Detector 853-002499-004
(LAM RESEARCH) Rotary Lifter 2300 Etch 853-015434-103

(MKS) Angle Vacuum Valve W/O Limit Switch
796-001604-001
796-801289-001

(MKS) Baratron Etch Manometer　
796-019591-004
797-800733-001

(ADVANCED ENERGY) RFDS Generator  660-024637-026

(ADVANCED ENERGY) RF Generator   660-900984-218

Semiconductor Equipment Spare Parts
644-099462-001
660-131938-001
685-008189-003
685-097330-006
715-012797-001
715-012798-001
715-443178-300
715-801916-812
716-800951-311
719-012640-011
734-007524-274
734-007524-275
734-007524-284
734-007524-294
734-007524-295
790-008220-010
796-090362-020
796-901038-004
799-000492-003
799-010890-002
799-010941-002
799-087380-001
799-087421-001
839-057679-104
857-004626-006
857-102231-001

(TEL) ECC2 Controller EC Rack BX80-000222-11
(TEL) Pump Board 1D08-000113-12
(TEL) PCB BOARD TYB 211-1GAS 1D81-00096-AA
(TEL) PCB BOARD 3381-000102-13
(TEL) PCB BOARD 3381-000102-15
(TEL) IO Control Module 3380-000130-11
(TEL) PCB Chiller I/F Board 881-621600-1
(NOR-CAL) Pneumatic Inline Valve 3870-02323
(AMAT) Interlock Personality PCB Board 0100-00509
(AMAT) Transfer Interlock Personality PCB 0100-01248
(AMAT) Producer SE CH Interlock Module 0190-07970
(AMAT) BRG Leadscrew Nut Assembly 3690-03269
(AMAT) Assy Centura HP ENP Transfer Robot 0010-76061
(AMAT) Coil Terminal Assembly 0040-48365
(AMAT) 200mm HDP Ultima Side Coil 0040-47488
(AMAT) DC Power Supply 0190-01893
(AMAT) Detect Ultima Clean PCB 0100-18035
(ADVANCED ENERGY) RF Generator RFG5500
(ADVANCED ENERGY) RF Generator RFG2000-2V 3155053-007 
(LAM) Computer, EC2, WIN XP REV A 63-431069-00
(WATLOW) LV Series Temperature Limit Controller LVC6JW00000750A
(GRANVILLE-PHILLIPS) Convectron Gauge 275821
(MKS) Pressure Controller 649A-25014
(MKS) Throttle Valve 253B-15416
(MKS) Throttle Valve 253B-15415
(TRAZAR) RF Match AMU2-1
(AMAT) 300MM HDP Ultima X   0021-47450
(AMAT) 300MM HDP Ultima X   0041-28991
(AMAT) Faceplate Teos High Dep Rate 300 MM Prpducer SA 0041-79433
(MKS) RPS Brand  0190-51222
(PILLAR) Bellows Pump PE-20MA
(PILLAR) Bellows Pump PE-40MA
(PILLAR) Bellows Pump PE-20MB
(NOVELLUS) Concept One Motor Drive  27-00082-00
(NOVELLUS) C3 ESC 02-264836-00
(NOVELLUS) Bearing 150 OD 19-034573-08
(NOVELLUS)  LF Generator Cable Hi Power 03-256244-01
(NOVELLUS) RF HF Cable 03-255004-00
(NOVELLUS) Controller 27-100878-00
(NOVELLUS) Vicor Power supply 03-255499-00
(NOVELLUS) RF Match 02-255013-00
(NOVELLUS) Controller Assy, Hdsioc 1 Vector 02-252396-00
(NOVELLUS) ASM sesioc Altus 2 02-307230-00
(NOVELLUS) PCB, PCA TC Filter 02-00216-00
(NOVELLUS) Shower Head 8 16-033931-00
(NOVELLUS) Heater Block, 2&3KW, 6Forks, Sequel, 8" 19-00154-00
(NOVELLUS) Cylinder, Pneumatic, Spindle Lif 60-00091-00
(NOVELLUS) Valve,Diaph,Monoblock,1/8 VCR 22-052448-00
(NOVELLUS) Shock Absorber 2 Stroke 20-00443-00
(NOVELLUS) Diamond EMM-8P-XT Emerald-MM 8-Channel RS-485  27-129142-00
(NOVELLUS) Tube Assy, H-Piece, 3/8 10-116652-00
(NOVELLUS) Excl Ring, 200MM X 2.25MM, OH, Semi 15-032939-00
(NOVELLUS) PC10422-CXS 20022 PC/104 Conaxial Star NIM 27-253688-00
(NOVELLUS) Valve DIA 1/4" Male VCR Swagelok  60-00208-00
(NOVELLUS) Swagelok 6LVV-P2V222P-AA  22-10528-00
(NOVELLUS) Altus Showerhead 03-00258-00
(NOVELLUS) PCA Assy Distrloution C3-Vector 03-314582-00
(NOVELLUS) Manifold, Backside 16-10070-00
(NOVELLUS) Power Supply ESC Improved DC Offset 27-034079-01
(NOVELLUS) Matching Network, Fixed Dome 27-132651-00
(NOVELLUS) Backside Wafer handling Interface xPRS PCB 03-299425-00
(NOVELLUS) Safey Sensor  03-121007-03
(NOVELLUS) Safey Sensor  03-121007-02 
(NOVELLUS) UP Seal 22-101053-00
(NOVELLUS) Seal Flange 22-028382-00
(NOVELLUS) Seal Lip  22-00325-00 
(NOVELLUS) Watlow Temperature Controller 27-1510594-00
(NOVELLUS) Damper, Rotary 20-10137-00
(NOVELLUS) Toggle clean Axis controller PCB 03-166293-00
(NOVELLUS) Assy Pin Lift 5 02-047200-03
(NOVELLUS) Assy Pin Lift 3 And 4  02-047200-02 
(NOVELLUS) Assy Pin Lift 1 And 2 02-047200-01 
(NOVELLUS) Robot Assy, Indexer Type 2, Left 02-053993-00
(NOVELLUS) (NOVELLUS) Robot Assy, Indexer Type 2 Right 02-053993-01 
(NOVELLUS) Motor Ext-Axis Indexer 02-034910-00 
(NOVELLUS) Robot Assy, Indexer Type 2 02-053993-01

(MKS) RPS 8slm NF3 Flow Intelligent Remote Plasma Source  AX7710TES-03

元發買賣有限公司/工控王國股份有限公司/松下伺服股份有限公司
(元発買売会社/工控王国株式会社/松下サーボ株式会社)
台灣桃園市平鎮區(324)新光路五段189號
Yuan-Far Electronics Trading Corporation/Spare Parts World Corporation/
Panasonic Servo Corporation
No.189, Sec. 5, Xinguang Rd., Pingzhen Dist., Taoyuan City 32458, Taiwan (R.O.C.)
TEL: 886-3-439-2555，886-3-439-6555
FAX:886-3-439-6922，886-3-439-0111
E-mail: steven1975.tw@gmail.com 
https://www.spare-parts.tw/

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