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產品內容
Description:
AST Chaser Plasma Etcher System provides the complete product line covering the production scale from volume production, pilot production to RD platform.
Aurora Sputter System has served Industry of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device applications.
1) LED / III-V Etching (GaN Mesa, GaAs Via, InP Trench)
2) Pattern Sapphire Substrate (PSS) Etching
3) Photonic Crystal (PhC) Etching
4) Silicon Etching (Deep Si Etching, Bulk Si Etching)
5) Si-based material Etching
6) Polymer Etching
7) Metal Etching
8) Quartz and Single Crystal Material Etching
Features:
Aurora series has system configuration of RIE, ICP, TCP, HDP, High Density Plasma source and Cryogenic Backside Helium Cooling System for substrate temperature control, suitable for different customer application.
Specification:
Standard Single Chamber Batch System and Multi-Chamber Cluster System Available.
Safety Approval:
TUV
Country of Origin:
Taiwan
Main Export Markets:
Worldwide
Please contact AST for your application.翻譯社
公司資訊
- 統一編號80071060
- 聯絡人翁慶毅
- 更多AST聚昌科技有限公司資訊
網頁更新日:
https://www.seoweb66.com/web/QA?postID=1172352電動油壓鋼筋剪 手提式鋼筋切斷機 電動鋼筋切斷
電動油壓鋼筋剪手提式鋼筋切斷機電動鋼筋切斷RC-16全新5分16mm售價:8800電壓:110V空載
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