Evaporator System

Description: AST MIDast Evaporator System provides the complete product line covering the production scale from volume production, pilot production to RD platform for Metal and Dielectric film deposition. MIDast Evaporator System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device, TCO, and AR Coatings. 1) Metal Film Deposition 2) Co-Deposition 3) Dielectric Film Deposition 4) Lift-off process 5) TCO (ITO) Deposition 6) DBR Mirrors Stack 7) AR (Anti Reflection) Coating 8) Backside Metal Process 9) High Deposition Rate Application Features: MIDast series has system configuration for thermal, e-beam evaporation source and ion beam assist deposition, suitable for different customer application. Specification: Standard Chamber Size, Capacity Available. Please contact AST for your application.Safety Approval: TUV Country of Origin: Taiwan Main Export Market: Worldwide半套店