BPN-400 Probe Station探針台

Specification:
1.4" Wafer stainless vacuum chuck
2.Chuck x-y stage行程101.6mmx101.6mm ring
3.Chuck theta rotation 0°～360° manual微調
4.Platen U型固定不動
5.chuck x-y stage最小移動距離≦５um
6.chuck 面積4"卡盤平整度≦5um
7.Box底座尺寸(450mm長x320mm寬x50mm高)