C4F6

Halocarbons 2316 / Hexafluorobutadiene

Application
Halocarbon 2316 (C4F6) is mainly used for DRAM and Semiconductor industry for high aspect ration etching.


Product Specification
Purity      99.99%
Other Fluorocarbons < 400
N2+O2+Ar <50
CO2 <20
H2O <5 ppmw
Acidity (as HF) <5 ppmw
*Unit: ppm